Below you will find pages that utilize the taxonomy term “(PEB)” Post exposure bake (PEB) heater Out on the lithography floor, the PEB step is where you lock in your linewidths. Slide the temperature 0.5°C across the wafer and you’ll print... Read more...
Post exposure bake (PEB) heater Out on the lithography floor, the PEB step is where you lock in your linewidths. Slide the temperature 0.5°C across the wafer and you’ll print... Read more...