Energy audit for fab drying
Keeping Your Fab Dry Without the Mess If you’re running a Class 100 cleanroom, you already know the nightmare of particulate shedding. One tiny...
MEMS sensor wafer drying heater
Why IR Heating Beats Hot Air for MEMS Wafer Drying If you’re still using hot air circulation to dry your MEMS sensor wafers, you’re...
Deionized water drying lamp
On the fab floor, one water mark can kill a whole lot after lithography. Conventional drying drifts in temperature, and particles ride off hot...
Timer for wafer drying oven
Out of the cleaning bath, a wafer comes with a skin of DI water. The drying oven has to strip that moisture off without cooking the photoresist or...